Micro-Pattern Imprinting Machine ST Series

ST50-UV

ST50S-LED

Features

  • Dedicated in UV imprinting
  • Complete imprinting of 4 inch substrate is possible (Option : 6 inch)
  • Adopting the film mold and quartz mold
  • Uniform pressure imprinting with the film mold
photonic crystal

Main Specifications

Item Content
Imprinting target Substrate
Target substrate size Up to 4 inch (option: 6 inch)
Imprinting method UV imprinting
Press force setting range 0 to 50 kN
Mold material Resin, Quartz
Supported clean level cleanness class ISO Class 5 (FED-STD209 Class 100)

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