Micro-Pattern Imprinting Machine ST Series
ST50-UV
Features
- Dedicated in UV imprinting
- Complete imprinting of 4 inch substrate is possible (Option : 6 inch)
- Adopting the film mold and quartz mold
- Uniform pressure imprinting with the film mold
Main Specifications
Item | Content |
---|---|
Imprinting target | Substrate |
Target substrate size | Up to 4 inch (option: 6 inch) |
Imprinting method | UV imprinting |
Press force setting range | 0 to 50 kN |
Mold material | Resin, Quartz |
Supported clean level cleanness class | ISO Class 5 (FED-STD209 Class 100) |