Product Information

High Precision Dicing Machine USM Series

Machining Examples

Dicing of SiC substrate for power semiconductor or for heat radiation (heat sink)

Picture of entire substrate

Picture of entire substrate

Workpiece material: 4H - SiC N-type wafer
(φ3inch × t0.36 mm) Feed speed: 30 mm/sec
Blade: φ2 inch × t0.035 mm

Picture of zoomed-in substrate

Picture of zoomed-in substrate

Dicing of LED heat sink

Picture of entire substrate

Picture of entire substrate

Workpiece material: Aluminum-alumite
(width 7.5, length 79, thickness 1.025 mm)
Dicing pitch: 3.205 x 5.825 mm
Blade: φ2 inch x t0.3 mm

Picture of zoomed-in substrate

Picture of zoomed-in substrate

V-grooving for an optical communication connector

Optical communication connector

Optical communication connector

Workpiece material: Quartz, Pyrex
V-groove: 70 degrees, 48 grooves per connector
Number of connectors per substrate: 10 connectors x 4 rows = 40 connectors

V-groove detail

V-groove detail

Grooving on tungsten carbide

Picture of entire surface

Picture of entire surface

Workpiece material: Tungsten carbide (90HRA)
Groove: width 0.06 mm, depth 0.5 mm, pitch 0.12 mm 
Number of machining paths: 1 path 

Picture of cross section

Picture of cross section

Grooving on ceramics

Picture of entire surface

Picture of entire surface

Workpiece material: Alumina ceramics
Groove: width 0.1 mm, depth 1 mm, pitch 0.3mm 
Number of machining paths: 1 path 

Picture of cross section

Picture of cross section

Grooving on resin material

Picture of entire surface

Picture of entire surface

Workpiece material: VESPEL ® (wholly aromatic polyimide resin)
Groove: width 0.05 mm, depth 0.5 mm, pitch 0.1 mm
Number of machining paths: 1 path 
(VESPEL ® is a registered trademark of DuPont.

Picture of cross section

Picture of cross section

Cutting of copper foil

Surface picture

Surface picture

Picture of cross section
Workpiece material: Copper foil (0.1 mm thick)
Diamond turning tool: Nose angle 44 deg./dry cutting 

Picture of cross section

Picture of cross section