Product Information

High Precision Dicing Machine USM Series

Features

The machine combines the operabilities of dicing machine and slicing machine that have been proven in machining performance.
You can experience easy-to-use high machining performance at hand and have flexible machining environment for difficult-to-machine materials.

High precision aerostatic bearing spindle

High precision aerostatic bearing spindle

The high precision aerostatic bearing spindle is equipped. The synchronous motor*1 is used to ensure high speed rotational accuracy, which provides the best spindle for 2-, 3-, and 4-inch diameter blade in use.
*1) In part, an induction motor is used.

Multi-blade machining

Multi-blade machining

The high stiffness aerostatic bearing spindle is used to ensure heavy duty multi-blade machining.
Compared to the single-blade machining, the machining efficiency has improved and the productivity increases significantly.

Case of 16-blade machining (multilayer filter for optical communication)

Case of 16-blade machining (multilayer filter for optical communication)

Four blades installed

Four blades are installed.

Blade diameter/workpiece surface detection function

Photoelectric blade diameter detection device

Photoelectric blade diameter detection device

The high precision blade diameter detection device and workpiece surface detection device are equipped, which are crucial to automation of gap elimination and setting a cutting depth.

Electric conductive chuck surface detection device

Electric conductive chuck surface detection device

Auto-focusing workpiece surface detection device (Patent pending)

Auto-focusing workpiece surface detection device (Patent pending)

Frame carrier device

Frame carrier device

The carrier robot is used to support full automaton.

Cleaning device

Cleaning device

Two-stream fluid nozzles are equipped, and cleaning sequence (arm swing speed, etc.) can be configured.

Fly cutting

Fly cutting

Fly cutting by a diamond turning tool enables thin film machining of soft metals like Cu.

Various flanges

Various flanges

Multi-blade flange, cup wheel flange, etc. are supported.