Product Information

Wafer transport SR404HC

TEL:
TOKYO MAIN BRANCH: 81-(0)3-3509-0270
NUMAZU HEADQUARTERS: 81-(0)55-926-5032

Overview

Wafer transport SR404HC

Specifications

CleanlinessClass 100
Arm lengthAxis 1200mm
Axis 2200mm
Working envelopeAxis 1±230°
Axis 2±160°
Axis 3 (Z-axis)100mm
Axis 4 (Z-rotation)±230°
Maximum speedAxis 1274°/s
Axis 2240°/s
Axis 3 (Z-axis)200mm/s
Axis 4 (Z-rotation)240°/s
LoadMaximum payload mass20kg
Allowable moment
of inertia at end
X, Y±0.05mm
Z-axis±0.05mm
Axis 4 (Z-axis rotation)±0.1°
Drive systemAC Servo Motor
Robot bodyMass200Kg
ColorMistywhite
Input Signal for Hand5 inputs, 2 outputs
Position Detection MethodAbsolute encoder mode
Attached CableStandard: 5 m (max. 30m)
Controller

TEL:
TOKYO MAIN BRANCH: 81-(0)3-3509-0270
NUMAZU HEADQUARTERS: 81-(0)55-926-5032