Product Information

Wafer transport SR624HC

TEL:
TOKYO MAIN BRANCH: 81-(0)3-3509-0270
NUMAZU HEADQUARTERS: 81-(0)55-926-5032

Overview

Wafer transport SR624HC

Specifications

CleanlinessClass 100
Arm lengthAxis 1310mm
Axis 2310mm
Working envelopeAxis 1±205°
Axis 2±160°
Axis 3 (Z-axis)100mm
Axis 4 (Z-rotation)±230°
Maximum speedAxis 1274°/s
Axis 2240°/s
Axis 3 (Z-axis)200mm/s
Axis 4 (Z-rotation)240°/s
LoadMaximum payload mass35kg
Allowable momentX, Y±0.05mm
of inertia at endZ-axis±0.05mm
Axis 4 (Z-axis rotation)±0.05°
Drive systemAC Servo Motor
Robot bodyMass220Kg
ColorMistywhite
Input Signal for Hand5 inputs, 2 outputs
Position Detection MethodAbsolute encoder mode
Attached CableStandard: 5 m (max. 30m)
Controller

TEL:
TOKYO MAIN BRANCH: 81-(0)3-3509-0270
NUMAZU HEADQUARTERS: 81-(0)55-926-5032